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Framework for the performance assessment of shop-floor control systems

: Mönch, L.; Rose, O.; Sturm, R.

Brooks-PRI Automation:
European Simulation Symposium for General Industry Applications : Innovation, Excellence, Agility, Value. February 18-19, 2003, Gent, Belgium
Gent, Belgien, 2003
European Simulation Symposium (ESS) <2003, Gent/Belgien>
Conference Paper
Fraunhofer IPA ()
semiconductor manufacturing; shop floor control; Software; Halbleiter; Fertigung; Simulation

In this paper we discuss the concept and design criteria for a framework that facilitates the performance assessment of shop-floor control systems. Our basic concept includes a simulation model that emulates the shop-floor of a wafer fab, sends information to the control system, and receives information back from the control system. The shop-floor control system is realized as a separate module that interfaces to the simulator via a data layer that contains the current shop floor status and the control information generated by the controller. We provide detailed information on how simulation model and shop-floor control system communicate and how each system triggers events in the other system. In addition, we show how this framework supports the performance assessment of the shop-floor control system under consideration. We present a prototype of the framework currently implemented in the course of the SRC/International Sematech FORCe project "Scheduling of Semiconductor Wafer Fabrication Facilities".