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Deterministic scheduling of wafer fab operations

: Pabst, D.; Fowler, J.W.; Pfund, M.; Mason, S.J.; Rose, O.; Mönch, L.; Sturm, R.

Brooks Automation Inc.:
Worldwide Automation Symposium 2003 : Technical Papers. Operational Excellence. October 20-24, 2003 Phoenix, AZ
Phoenix, AZ, USA, 2003
ISBN: 0-9729100-2-6
Worldwide Automation Symposium <2003, Phoenix/Ariz.>
Conference Paper
Fraunhofer IPA ()
wafer fabrication; Halbleiter; Simulation; Fertigung; Planung

In this paper, we present a modification of the Shifting Bottleneck heuristic (MSB) for scheduling wafer fabrication facilities. Implementing a determinstic scheduling approach within a simulation model (ASAP) is nontrivial. The simulation model serves as the MES system emulator in addition to performing traditional simulation tasks. Implementation issues as well as results of the MSB are presented.