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Thermo-mechanical properties of a deformable mirror with screen printed actuator

: Bruchmann, Claudia; Appelfelder, Michael; Beckert, Erik; Eberhardt, Ramona; Tünnermann, Andreas


Olivier, Scot S. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MEMS Adaptive Optics VI : San Francisco, California, USA, 24 January 2012
Bellingham, WA: SPIE, 2012 (SPIE Proceedings 8253)
ISBN: 978-0-8194-8896-1
Paper 82530D
Conference "MEMS Adaptive Optics" <6, 2012, San Francisco/Calif.>
Conference Paper
Fraunhofer IOF ()
deformable mirror; unimorph; laser-induced deformation; thermally-induced deformation; homogeneous loading; compound loading

This paper reports on the thermo-mechanical modeling and characterization of a screen printed deformable mirror. The unimorph mirror offers a ceramic LTCC substrate with screen printed PZT layers on its rear surface and a machined copper layer on its front surface. We present the thermo-mechanical model of the deformable mirror based on Ansys multiphysics. The developed mirror design is practically characterized. The homogeneous loading of the optimized design results in a membrane deformation with a rate of -0.2 µm/K, while a laser loading causes a change with a rate of 1.3 µm/W. The proposed mirror design is also suitable to pre-compensate laser generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35 K pre-heating of the mirror assembly could compensate an absorbed laser power of 1.25 W.