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Alternative application of predictive image simulation: Speckle techniques for surface characterization

Presentation held at the 9th Fraunhofer IISB Lithography Simulation Workshop, September 15 - 17, 2011 in Hersbruck, Germany
 
: Evanschitzky, Peter

:
presentation urn:nbn:de:0011-n-1944599 (5.5 MByte PDF)
MD5 Fingerprint: 29b88df3d64f8779702bb79a39d54cea
Created on: 10.2.2012


2011, 27 Folien
Lithography Simulation Workshop <9, 2011, Hersbruck>
English
Presentation, Electronic Publication
Fraunhofer IISB ()
image simulation; speckle simulation; surface shape measurement; surface deformation measurement

: http://publica.fraunhofer.de/documents/N-194459.html