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An EUV beamsplitter based on conical grazing incidence diffraction

: Braig, C.; Fritzsch, L.; Käsebier, T.; Kley, E.-B.; Laubis, C.; Liu, Y.; Scholze, F.; Tünnermann, A.

Postprint (3.7 MByte; PDF; )

Optics Express 20 (2012), No.2, pp.1825-1838
ISSN: 1094-4087
Journal Article, Electronic Publication
Fraunhofer IOF ()

We present an innovative grating design based on conical diffraction which acts as an almost perfect and low-loss beamsplitter for extreme ultraviolet radiation. The scheme is based on a binary profile operated in grazing incidence along the grating bars under total external reflection. It is shown that periods of a few 102 nm may permit an exclusive (±1)st order diffraction with efficiencies up to ~ 35% in each of them, whereas higher evanescent orders vanish. In contrast, destructive interference eliminates the 0th order. For a sample made of SiO2 on silicon, measured data and simulated results from rigorous coupled wave analysis procedures are given.