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Wear behavior in microactuator interfaces

: Bandorf, R.; Pape, F.; Gatzen, H.H.; Bräuer, G.


Büttgenbach, S. ; Sonderforschungsbereich Konstruktion und Fertigung Aktiver Mikrosysteme, Braunschweig:
Design and manufacturing of active microsystems
Berlin: Springer, 2011 (Microtechnology and MEMS)
ISBN: 978-3-642-12902-5
ISBN: 978-3-642-12903-2
Book Article
Fraunhofer IST ()

The growing number of active microsystems applications leads to a demand for enhanced reliability and durability of the moving microparts. The lifetime of the microsystems is closely related to protective coatings on the mating surface.
This chapter deals with the improvement of the microwear resistance of various thin films, the deposition techniques, and the analysis tools on the microscale. The thin films were prepared using Physical Vapor Deposition (PVD) and Plasma Enhanced Chemical Vapor Deposition (PECVD). From a variety of coatings, the most promising results were gained for cabon based films. The typical film thickness was in a range of a few hundred nanometer. The micro-/ nanowear was investigated by an Atomic Force Microscope (AFM) based under single asperity contact by methods of nanoindentation and nanoscratch testing. For an investigation of multi asperity contact specific test equipment was set up for charcterization under rotating and oscillating motion. Along with the improvement by the coatings it was found that additionally the sustrate material pays an important role for the microbiological system.