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On-chip integrated lensless fluorescence microscopy/spectroscopy module for cell-based sensors

: Li, W.; Knoll, T.; Sossalla, A.; Bueth, H.; Thielecke, H.


Gannot, I. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical fibers, sensors, and devices for biomedical diagnostics and treatment XI. Proceedings : Part of SPIE Photonics West. 22 - 23 January 2011, San Francisco, California, United States
Bellingham, WA: SPIE, 2011 (SPIE Proceedings 7894)
ISBN: 978-0-8194-8431-4
ISSN: 0038-7355
Paper 78940Q
Conference "Optical Fibers, Sensors, and Devices for Biomedical Diagnostics and Treatment" <11, 2011, San Francisco/Calif.>
Photonics West Conference <2011, San Franciso/Calif.>
Conference Paper
Fraunhofer IBMT ()

The integration of a fluorescence microscopy/spectroscopy module in cell-based lab-on-a-chip systems is of high interest for applications in cell-based diagnostics and substance evaluation in situ. We present an on-chip integrated lensless fluorescence imaging module applying the principle of contact/proximate optical lithography. The pixel resolution is comparable with a 4 x objective microscope. The module can be used for morphology and fluorescence imaging of mammalian cells (15 - 20 m) as well as for testing the concentration of a fluorescent substance. The biological samples or solutions are sustained in disposable sterilized microfluidic chips with 1 m thick silicon nitride (Si3N4) membranes. These chips are assembled on the surface of a 5 megapixel colored CMOS image sensor array with 1.75 m pixel size, which is coated with an additional interference filter. Each culturing chip consists of a MEMS cavity chip and a PDMS microfluidic interface. The surface of the C MOS image sensor is smoothened using SU-8 photoresist spin-coating for a commercial grade interference filter (optical density 5) coating by Plasma-Ion Assisted Deposition thereafter. The function is demonstrated by primary imaging results of the non-/fluorescent mammalian cells/microspheres as well as by differentiating different concentrations of FITC solutions.