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Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes

: Tortschanoff, Andreas; Frank, A.; Wildenhain, Michael; Kenda, Andreas; Sandner, Thilo


Journal of micro/nanolithography, MEMS and MOEMS 10 (2011), No.3, Art. 033006
ISSN: 1537-1646
ISSN: 1932-5150
ISSN: 1932-5134
European Commission EC
FP7-ICT; 248623; TACO
Journal Article
Fraunhofer IPMS ()

We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonancemust be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.