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Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

: Tortschanoff, A.; Frank, A.; Lenzhofer, M.; Wildenhain, Michael; Sandner, Thilo; Kenda, A.


Schmid, U. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Smart sensors, actuators, and MEMS V : 18-20 April 2011, Prague, Czech Republic
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 8066)
ISBN: 978-0-8194-8655-4
Paper 80660O
Conference "Smart Sensors, Actuators, and MEMS" <5, 2011, Prague>
European Commission EC
FP7-ICT; 248623; TACO
Conference Paper
Fraunhofer IPMS ()

We have developed compact devices comprising optical position sensing and driver electronics with closed loop control, capable of driving resonant 1D-and 2D-MOEMS scanner mirrors. Position encoding is realized by measuring a laser beam reflected from the backside of the mirror. In the 2D-device we use cylindrical mirrors in order to suppress the deflection of the orthogonal dimension. This reduces the problem to the control of two independent 1D-oscillations and allows accurate position sensing. The phase between the oscillations of the two orthogonal axes is actively controlled to achieve a stable Lissajous figure. In this contribution we also demonstrate that this approach is scalable for synchronization of separate MEMS mirrors.