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Biocompatible AlN-based piezo energy harvesters for implants

: Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Hampl, S.; Cimalla, V.; Lebedev, V.


Institute of Electrical and Electronics Engineers -IEEE-:
16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 : 5-9 June 2011, Beijing
New York, NY: IEEE, 2011
ISBN: 978-1-4577-0157-3
ISBN: 978-1-4577-0156-6
International Solid-State Sensors, Actuators and Microsystems Conference <16, 2011, Beijing>
Conference Paper
Fraunhofer IAF ()

In this work, we show that thin biocompatible AlN films reveal a stable, frequency independent piezoresponse demonstrating a good applicability for implantable micro-generators. It was demonstrated that although more power is generated by resonant (tensile stressed) systems, e.g. cantilevers and planar membranes, the non-resonant (compressive stressed) systems, e.g. corrugated membranes, are preferable for this purpose due to the generation of sufficient power at low-frequency aperiodic vibrations and at very low accelerations.