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Comparative study of residual stress measurement techniques with high spatial resolution

: Vogel, D.; Maus, I.; Schindler-Saefkow, F.; Michel, B.


Quan, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Fourth International Conference on Experimental Mechanics 2009. Vol.1 : 18 - 20 November 2009, Singapore; ICEM 2009
Bellingham, WA: SPIE, 2010 (Proceedings of SPIE 7522)
ISBN: 978-0-8194-7912-9
Paper 752224
International Conference on Experimental Mechanics (ICEM) <4, 2009, Singapore>
Conference Paper
Fraunhofer ENAS ()
Fraunhofer IZM ()

Three different methods of stress measurement with strong spatial resolution are presented. They base on stress relief techniques caused by focused ion beam milling, on altered electron backscattering by deformed lattices and on Stokes line shift measurements by Raman spectroscopy. The capability of these methods is demonstrated by their application to typical MEMS structures. A comparison between the methods is performed in order to outline potentials and limitations.