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Microwave plasma-assisted diamond synthesis reactor design for large deposition areas at high rates
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2009
Conference Paper
Titel
Microwave plasma-assisted diamond synthesis reactor design for large deposition areas at high rates
Author(s)
Hemawan, K.W.
Gu, Y.
Lu, J.
Grotjohn, T.A.
Asmussen, J.
Hauptwerk
IEEE 36th International Conference on Plasma Science Abstracts, ICOPS 2009
Konferenz
International Conference on Plasma Sciences (ICOPS) 2009
DOI
10.1109/PLASMA.2009.5227481
Language
English
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Fraunhofer-Institut für Lasertechnik ILT