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Gas phase modification of superhard carbon coatings deposited by pulsed DC-arc-process

 
: Grimm, W.; Weihnacht, V.

:

Plasma Processes and Polymers 6 (2009), Suppl.1, pp.S433-S437
ISSN: 1612-8850
ISSN: 1612-8869
English
Journal Article
Fraunhofer IWS ()

Abstract
The pulsed vacuum arc discharge (pulsed arc) is the most efficient PVD technology for deposition of hard amorphous carbon coatings on tools and machinery parts. Due to the pulsed arc discharge a stable evaporation process and the efficient deposition of hydrogen-free a-C type coatings is possible. This paper shows that the pulsed arc enables the deposition of ta-C and modified a-C coatings with interesting coating properties in a wide pressure range of argon, acetylene and ammonia gas atmosphere. Coatings with different gas flow rates of these gases were deposited on steel substrates. The coating properties were characterized by using different analytical methods for determination of structure, hardness, friction and wear behaviour. The changes of film properties in dependence of the kind and the rate of gas flow are compared and discussed.

: http://publica.fraunhofer.de/documents/N-188243.html