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Improved MEMS based FT-IR spectrometer: Position encoding and closed loop control

: Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Kenda, A.; Sandner, T.; Schenk, H.


Institute of Electrical and Electronics Engineers -IEEE-:
ISOT 2009, International Symposium on Optomechatronic Technologies. Proceedings : 21-23 September 2009, Istanbul,Turkey
Piscataway, NJ: IEEE, 2009
ISBN: 1-4244-4209-5
ISBN: 978-1-4244-4210-2
International Symposium on Optomechatronic Technologies (ISOT) <2009, Istanbul>
Conference Paper
Fraunhofer IPMS ()

We discuss recent improvements of our MEMS-based FT-IR spectrometer. A novel MEMS actuator design of the translational mirrors features an increased mirror surface of 7 mm2 and enables larger translation amplitudes (up to ±250 m), leading to improved performance of the spectrometer. Furthermore we present a new method for accurate position detection of the MEMS device, thus enabling the implementation of closed-loop control. A dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zero-crossing position of the mirror. The implementation of a closed-loop control ensures optimally stable MEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions allowing building robust MEMS-based Fourier-transform infrared (FT-IR) spectrometers with large mechanical amplitudes and thus good spectral resolutions.