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Electric properties and surface characterization of transparent Al-doped ZnO thin films prepared by pulsed laser deposition

: Kim, J.-P.; Lee, S.-A.; Bae, J.S.; Park, S.-K.; Choi, U.-C.; Cho, C.-R.


Thin solid films 516 (2008), No.16, pp.5223-5226
ISSN: 0040-6090
Journal Article
Fraunhofer IGB ()

We grew 2 wt.% Al-doped ZnO (AZO) films on 5.08 cm-diameter polymer substrates at room temperature by the pulsed laser deposition (PLD) technique added the beam-rastering function. The structural properties, surface morphology, resistivity, mobility and chemical bonding states of AZO/polymer films were measured. The structuring of polymer surface by atmospheric plasma can occur at nm scales and can influence adhesion, optical and wettability properties of the materials. With increasing plasma treatment power, surface hydrophilicity and roughness for PET and PES polymer increased, respectively.