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2008
Conference Paper
Titel
Abbau von fluorhaltigen Kohlenwasserstoffen durch atmosphärische Mikrowellenplasmen
Abstract
An AiF sponsored study shows the potential of microwave driven atmospheric plasma for the abattement of PFCs as they are wasted in the microelectronic processing. 97% removal of CF4or SF6 effluents are shown in concentrations as high as 10000 ppm in Nitrogen flows as high as 80 slm. The reactor device is upscalable to higher microwave power input. Its capacity of being a Point-of-Use equipment, even for cluster-tools, is undeniable especially as new low purge-volume vacuum-pumps will establish and the processes switch to more compliant etch gases.