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Integration of real factory variability in AMHS simulations for wafer fabs

: Glüer, D.; Sturm, R.

Dolgui, A. ; International Federation of Automatic Control -IFAC-; International Federation of Operational Research Societies -IFORS-; Institute of Electrical and Electronics Engineers -IEEE-; Ecole Nationale Superieure des Mines de Saint-Etienne:
12th IFAC Symposium on Information Control Problems in Manufacturing, INCOM' 2006. Vol.1: Information Systems, Control and Interoperability : Preprints, May 17-19, 2006, Saint-Etienne, France
Saint-Etienne, France, 2006
ISBN: 0-08-044654-X
ISBN: 978-0-08-044654-7
Symposium on Information Control Problems in Manufacturing (INCOM) <12, 2006, Saint-Etienne>
Conference Paper
Fraunhofer IPA ()

Most of the existing simulations in the area of semiconductor manufacturing are based on feeding rate approaches. Here, exponential distributions are mainly used for fast simulation results. The drawback is that exponential distributions often do not reflect real production conditions well enough. This paper describes results based on other standard types of distributions and on a new scripted move approach, which allows more realistic simulation results. The paper compares the results based on data from AMD's Fab 30.