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  4. Flying Wafer - A standardised methodology for multi-site processing of 300 mm wafers at R&D-sites
 
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2006
Conference Paper
Title

Flying Wafer - A standardised methodology for multi-site processing of 300 mm wafers at R&D-sites

Abstract
FLYING WAFER was a joint European project funded in the 6th Framework of the European Commission. The objective was to provide a methodology for interlinking European R&D centres in micro- and nanotechnologies to a distributed 300 mm CMOS R&D line. The FLYING WAFER project was carried out as a feasibility study. Therefore, the results provided a model and concept which has the potential of guaranteeing a safe and fast exchange of wafers and data between European R&D nodes to allow multi-site processing.
Author(s)
Frickinger, J.
Oechsner, R.  
Schellenberger, M.  
Pfeffer, M.  
Pfitzner, L.
Ryssel, H.
Claeys, C.
Claes, M.
Bearda, T.
Renaud, D.
Danel, A.
Lering, M.
Graef, M.
Kaushik, V.
Murphy, B.
Fritzsche, M.
Walther, H.
Hury, S.
Mainwork
12th IFAC Symposium on Information Control Problems in Manufacturing, INCOM' 2006. Vol.2: Industrial Engineering  
Conference
Symposium on Information Control Problems in Manufacturing (INCOM) 2006  
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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