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Investigations on clearance seal units for moving elements in an ultra-high vacuum region
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2011
Conference Paper
Titel
Investigations on clearance seal units for moving elements in an ultra-high vacuum region
Author(s)
Heidler, N.
Mohaupt, M.
Risse, S.
Döring, H.-J.
Hauptwerk
Innovation in mechanical engineering - shaping the future
Konferenz
Internationales Wissenschaftliches Kolloquium (IWK) 2011
International Scientific Colloquium 2011
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Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF