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Non-contact multilayer thickness measurements with reflection-mode terahertz time-domain spectroscopy

: Feige, V.; Nix, S.; Ellrich, F.; Jonuscheit, J.; Beigang, R.


Institute of Electrical and Electronics Engineers -IEEE-; Optical Society of America -OSA-, Washington/D.C.:
European Conference on Lasers and Electro-Optics and 12th European Quantum Electronics Conference, CLEO Europe/EQEC 2011. Vol.1 : 22 - 26 May 2011, Munich, Germany
New York, NY: IEEE, 2011
ISBN: 978-1-4577-0533-5
ISBN: 978-1-4577-0532-8
European Conference on Lasers and Electro-Optics (CLEO Europe) <2011, Munich>
European Quantum Electronics Conference (EQEC) <12, 2011, Munich>
Conference Paper
Fraunhofer IPM ()
spectroscopy; terahertz wave; nondestructive testing; quality control

Terahertz waves penetrate nonconductive coatings and are reflected at the boundary layers between different refraction indices. This creates new potential for quality control when added to established nondestructive testing techniques such as ultrasonic or x-ray.