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Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
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2011
Conference Paper
Titel
Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Author(s)
Murakami, Katsuhisa
Rommel, Mathias
Yanev, Vasil
Bauer, A.J.
Frey, Lothar
Hauptwerk
Frontiers of Characterization and Metrology for Nanoelectronics 2011
Konferenz
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2011
DOI
10.1063/1.3657879
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Tags
dielectric thin films
grain boundary
atomic force microscopy
conductive AFM
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