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A novel mass sensitive sensor

 
: Goehlich, A.; Jonville, C.; Klieber, R.; Mao, X.; Martens, K.; Jansen, T.; Trieu, H.-K.; Vogt, H.

Schlaak, H.F. ; Bundesministerium für Bildung und Forschung -BMBF-, Deutschland; Verband der Elektrotechnik, Elektronik, Informationstechnik -VDE-:
MikroSystemTechnik Kongress 2011 : 10.-12. Oktober 2011, Darmstadt
Berlin: VDE-Verlag, 2011
ISBN: 978-3-8007-3367-5
pp.54-57
Konferenz "Systems Integration - Mikrosystemtechnik-Lösungen im Gebäude der Zukunft" <4, 2011, Dortmund>
MikroSystemTechnik Kongress <2011, Darmstadt>
English
Conference Paper
Fraunhofer IMS ()
Massensensor; CMOS kompatibel; nichtlinear; mass sensor; CMOS compatible; nonlinear

Abstract
In this contribution we report on a novel sensor that has been developed within the framework of the Euregio Unihealth project. This project aims at the development of a marker free bio sensor that is intended for the detection of certain allergens, e.g. gluten. The adopted sensor principle relies on electrostatically driven resonating membrane structures with a functionalized surface that allows for the selective binding of allergens. The allergen binding causes an increase of the effective mass of the membrane and therefore induces a decrease of the mechanical resonance frequency. The sensor structure itself is realized with the aid of an existing capacitive pressure sensor technology. The performed measurements of the electrical spectra show non linear effects due to the electrostatic excitation mechanism. These effects are explained in terms of a nonlinear oscillator model.

: http://publica.fraunhofer.de/documents/N-183324.html