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Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

: Stenzel, O.; Schürmann, M.; Wilbrandt, S.; Kaiser, N.; Tünnermann, A.; Mende, M.; Ehlers, H.; Ristau, D.; Bruns, S.; Vergöhl, M.; Riggers, W.; Bischoff, M.; Held, M.


Lequime, M. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in Optical Thin Films IV : SPIE Optical System Design 2011, 5.-8.9.2011, Marseille, France
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 8168)
ISBN: 978-0-8194-8794-0
Paper 81681W
Conference "Advances in Optical Thin Films" <4, 2011, Marseille>
Conference Paper
Fraunhofer IOF ()
Fraunhofer IST ()
optical constants; mechanical stress; hafnia; alumina; multilayer

The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.