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A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
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2011
Journal Article
Titel
A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
Author(s)
Murakami, M.
Rommel, M.
Yanev, V.
Erlbacher, T.
Bauer, A.J.
Frey, L.
Zeitschrift
Journal of applied physics
DOI
10.1063/1.3631088
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Tags
IV characteristics
alpha-V
current conduction mechanisms