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2011
Conference Paper
Titel
Thin film sensor systems based on hydrogenated carbon
Abstract
The thin film layer system, presented in this paper, combines an excellent tribological behaviour with sensory qualities. The main part of the layer system is the hydrogenated carbon layer, one member of the carbon based coatings, deposited in a PECVD process. The hardness of the layer is in the range of 20 GPa and the coefficient of friction is about 0.2. The tribological properties of this layer are comparable to the well known DLC (diamond like carbon) layer [1, 2]. It also shows a well detectable piezo resistive characteristic. Under pressure the layer changes its resistance. This offers the possibility of integrating this sensory layer in high load regions for the detection of pressure and load distributions.