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A far infrared VGA detector based on uncooled microbolometers for automotive applications

: Weiler, D.; Ruß, M.; Würfel, D.; Lerch, R.G.; Yang, P.; Bauer, J.; Kropelnicki, P.; Heß, J.; Vogt, H.


Meyer, G. ; European Technology Platform on Smart Systems Integration -EPoSS-:
Advanced microsystems for automotive applications 2011 : Smart systems for electric, safe and networked mobility; 15th International Forum on Advanced Microsystems for Automotive Applications (AMAA 2011) "Smart Systems for Electric, Safe and Networked Mobility; 29.-30.06.2011, Berlin
Berlin: Springer, 2011
ISBN: 978-3-642-21380-9
ISBN: 3-642-21380-4
ISBN: 978-3-642-21381-6
International Forum on Advanced Microsystems for Automotive Applications (AMAA) <15, 2011, Berlin>
Conference Paper
Fraunhofer IMS ()
automotive night vision; far infrared; bolometer; infrared sensor technology; sensor array; ROIC; vacuum package

Warm bodies like humans or animals emit radiation in the long-wave infrared band (8 to 14 µm) which can be used for pedestrian detection in an automotive application. Fraunhofer-IMS has developed an advanced 640 x 480 (VGA) IR detector (IRFPA=infrared focal plane array) based on uncooled micro bolometers with a pixel-pitch of 25µm. The IRFPA is designed for thermal imaging applications with a full-frame frequency of 30 Hz and a high sensitivity with a NETD < 100 mK @ f/1. The microbolometer as the sensing element is based on amorphous silicon as the sensing layer. A novel readout architecture which utilizes massively parallel on-chip Sigma-Delta-ADCs located under the microbolometer array re sults in a high performance digital readout. Since packaging is a significant part of a IRFPA's price Fraunhofer-IMS uses a chip-scaled package consisting of an IR-transparent window with antireflection coating and a soldering frame for maintaining the vacuum. The IRFPAs are completely fabricated at Fraunhofer-IMS on 8" CMOS wafers with an additional surface micromachining process.