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Micro/nano technologies towards smart systems integration
|Tang, T.-A. ; Institute of Electrical and Electronics Engineers -IEEE-; Institute of Electrical and Electronics Engineers -IEEE-, Beijing Section; IEEE Electron Devices Society:|
10th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2010. Proceedings. Vol.3 : Nov. 1- 4, 2010, Shanghai, China
New York, NY: IEEE, 2010
|International Conference on Solid-State and Integrated Circuit Technology (ICSICT) <10, 2010, Shanghai>|
| Conference Paper|
|Fraunhofer ENAS ()|
The micro and nano system technologies as well as electronics are playing a key role in today's product development and industrial progress. They enable the integration of mechanical, electrical, optical, chemical, biological and other functions into a very small space with dimensions ranging from sub micrometers up to some millimeters. This paper presents different examples of MEMS sensors and systems developed at Fraunhofer ENAS and Chemnitz University of Technology. It starts with silicon based technologies applied for MEMS laser displays and miniaturized MEMS spectrometer. The integration of new materials and new technologies is shown for point of care diagnostics.