Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

A resonance PLL-based tracking system for capacitive sensors - MEMS/NEMS

 
: Wiegand, C.; Hangmann, C.; Hedayat, C.; Hilleringmann, U.

Gessner, T.:
Smart systems integration 2010. 4th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM : Como, Italy, 23 - 24 March 2010
Berlin: VDE-Verlag, 2010
ISBN: 978-3-8007-3208-1
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <4, 2010, Como>
English
Conference Paper
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/documents/N-177559.html