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Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics
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2011
Conference Paper
Titel
Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics
Author(s)
Zimmer, F.
Lapisa, M.
Königlich Technische Hochschule Stockholm
Bakke, T.
Sintef, Norway
Bring, M.
Stemme, G.
Königlich Technische Hochschule Stockholm
Niklaus, F.
Königlich Technische Hochschule Stockholm
Hauptwerk
IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. Vol.2
Konferenz
International Conference on Micro Electro Mechanical Systems (MEMS) 2011
DOI
10.1109/MEMSYS.2011.5734530
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS