Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics
| Institute of Electrical and Electronics Engineers -IEEE-; IEEE Robotics and Automation Society:
IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. Vol.2 : Cancun, Mexico, 23 - 27 January 2011
Piscataway/NJ: IEEE, 2011
ISBN: 978-1-4244-9632-7
ISBN: 978-1-4244-9634-1
ISSN: 1084-6999
pp.736-739 |
| International Conference on Micro Electro Mechanical Systems (MEMS) <24, 2011, Cancun> |
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| English |
| Conference Paper |
| Fraunhofer IPMS () |