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Position feedback and phase control of resonant MOEMS-mirrors with one and two axes

: Tortschanoff, A.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.


Jakoby, B.; Vellekoop, M.J.:
Eurosensors XXIV Conference 2010 : September 5-8, 2010, Linz, Austria
Amsterdam: Elsevier, 2010 (Procedia engineering 5.2010)
ISSN: 1877-7058
Eurosensors <24, 2010, Linz>
Conference Paper
Fraunhofer IPMS ()

Resonantly driven oscillating MOEMS mirrors are of high interest for various fields in optics, telecommunications and spectroscopy. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. For this reason, we have developed a compact device comprising optical position sensing, and driver electronics, with closed loop control, capable of driving resonant 1D-MOEMS micro-mirrors. Very recently, we extended our approach to 2D scanner mirrors. In this contribution we present the position encoding and feedback scheme of the novel 2D device.