English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Piezoelectric behaviour of sputtered aluminium nitride thin film for high frequency ultrasonic sensors
Details
Full
Export
Statistics
Options
2011
Conference Paper
Titel
Piezoelectric behaviour of sputtered aluminium nitride thin film for high frequency ultrasonic sensors
Author(s)
Herzog, T.
Walter, S.
Bartzsch, H.
Gittner, M.
Gloess, D.
Heuer, H.
Hauptwerk
Review of progress in quantitative nondestructive evaluation
Konferenz
Annual Review of Progress in Quantitative Nondestructive Evaluation (QNDE) 2010
DOI
10.1063/1.3592128
Language
English
google-scholar
View Details
IZFP-D