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Application of test structures for monitoring of high frequency characteristics of organic substrate materials

: Salhi, F.; Sommer, G.; John, W.; Reichl, H.

8th IEEE Workshop on Signal Propagation on Interconnects. Proceedings : 9 - 12 May 2004, Heidelberg
Piscataway, NJ: IEEE Service Center, 2004
ISBN: 0-7803-8470-9
Workshop on Signal Propagation on Interconnects <8, 2004, Heidelberg>
Conference Paper
Fraunhofer IZM ()

This paper introduces two basic test structures and its functionality for continuous determination of electrical properties of material as well as geometrical parameter of substrate designs. On the basis of a high frequency substrate with known characteristics, a method for determination of material properties in a frequency range of 1 GHz to at least 24 GHz is presented. Fundamental importance is attached to the relative permittivity, r, and the dissipation factor, tan. High frequency measurements are compared to simulation results. Finally, the extracted material parameters are presented and discussed. Methods of line resonator and branch line coupler are compared concerning accuracy, sensitivity and manageability.