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Deformation field measurement on micro and nanotechnology components utilizing SFM and FIB equipment

: Vogel, D.; Keller, J.; Gollhardt, A.; Michel, B.


Quan, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics. Part I : 29 November - 1 December 2004, Singapore
Bellingham, WA: SPIE, 2005 (Proceedings of SPIE 5852)
ISBN: 0-8194-5852-X
International Conference on Experimental Mechanics <3, 2004, Singapore>
Conference Paper
Fraunhofer IZM ()

The authors present a digital image correlation (DIC) tool, which allows to measure deformation fields on micro and nano system components under thermal and/or mechanical impact. Load state micrographs are used to extract displacement and strain fields. An earlier developed DIC concept for that purpose has been extended from SEM to AFM and FIB imaging. As a consequence ultimate measurement resolution can be achieved by AFM imaging. The advantages of the new focused ion beam (FIB) approach occur in the incorporation of specimen preparation (ion milling, ion beam surface polishing and DIC patterning), specimen loading by ion milling and DIC deformation measurement in a single equipment. The application of DIG techniques on AFM base is illustrated for the investigation of thermal deformations on microsystem structures as well as for the evaluation of microcracks from crack opening displacements. Some first results for residual stress release by ion milling with subsequent deformation field measurement are reported, too.