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Hier finden Sie wissenschaftliche Publikationen aus den FraunhoferInstituten. Parametric finite element analysis for reduced order modeling of MEMS
 Ernst, L.J. ; Institute of Electrical and Electronics Engineers IEEE: Thermal, Mechanical and MultiPhysics Simulation and Experiments in MicroElectronics and MicroSystems, EuroSimE 2006 : Proceedings of the EuroSimE 2006, April 2426, Como, Italy New York, NY: IEEE, 2006 ISBN: 1424402751 ISBN: 9781424402755 pp.220225 
 International Conference on Thermal, Mechanical and MultiPhysics Simulation and Experiments in MicroElectronics and MicroSystems (EuroSimE) <7, 2006, Como> 

 English 
 Conference Paper 
 Fraunhofer IZM () Fraunhofer ENAS () 
Abstract
In this paper we describe a simulation methodology based on FEM to automatic generating reduced order models of coupled microelectromechanical systems (MEMS). In particular, the time consuming FE data sampling process should be replaced by a single finite element run. The idea of the new approach is to compute not only the governing system matrices but also high order partial derivatives with regard to design parameters by means of Automatic Differentiation. As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to dimensional and physical parameters. The approach is demonstrated on example of a micromirror cell.