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Parametric simulation of MEMS based on automatic differentiation of finite element codes

: Kolchuzhin, V.; Mehner, J.; Gessner, T.; Doetzel, W.

Laudon, M. ; Nano Science and Technology Institute -NSTI-:
NSTI Nanotechnology Conference and Trade Show 2006. Vol.3 : NSTI Nanotech 2006; May 7 - 11, 2006, Hynes Convention Center, Boston, Massachusetts, U.S.A.; An interdisciplinary integrative forum on nanotechnology, biotechnology and microtechnology
Cambridge, Mass. [u.a.]: NSTI, 2006
ISBN: 0-9767985-6-5
ISBN: 0-9767985-9-X
Nanotechnology Conference and Trade Show (Nanotech) <9, 2006, Boston/Mass.>
Conference Paper
Fraunhofer IZM ()
Fraunhofer ENAS ()

In this paper, we describe a simulation methodology based on differentiation of Finite Element (FE) codes to parametric simulation of coupled microelectro-mechanical systems (MEMS). The idea of the new approach is to compute not only the governing system matrices but also high order partial derivatives with regard to design parameters by means of Automatic Differentiation (AD). As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to dimensional and physical parameters. The approach is demonstrated on example of an electrostatic actuating beam. Essential speed-up can be achieved for shape optimization, sensitivity analyses and data sampling needed for Reduced Order Modeling (ROM) of MEMS.