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2006
Conference Paper
Titel
Parametric simulation of MEMS based on automatic differentiation of finite element codes
Abstract
In this paper, we describe a simulation methodology based on differentiation of Finite Element (FE) codes to parametric simulation of coupled microelectro-mechanical systems (MEMS). The idea of the new approach is to compute not only the governing system matrices but also high order partial derivatives with regard to design parameters by means of Automatic Differentiation (AD). As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to dimensional and physical parameters. The approach is demonstrated on example of an electrostatic actuating beam. Essential speed-up can be achieved for shape optimization, sensitivity analyses and data sampling needed for Reduced Order Modeling (ROM) of MEMS.