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VCSEL-based miniature laser-self-mixing interferometer with integrated optical and electronic components

: Pruijmboom, A.; Booij, S.; Schemmann, M.; Werner, K.; Hoeven, P.; Limpt, H. van; Intemann, S.; Jordan, R.; Fritzsch, T.; Oppermann, H.; Barge, M.


Glebov, A.L. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Photonics packaging, integration, and interconnects IX : 26 - 28 January 2009, San Jose, California, United States
Bellingham, WA: SPIE, 2009 (SPIE Proceedings Series 7221)
ISBN: 978-0-8194-7467-4
ISSN: 0277-786X
Art. 72210S
Conference "Photonics Packaging, Integration, and Interconnects" <9, 2009, San Jose/Calif.>
Conference Paper
Fraunhofer IZM ()

It has been previously published [1] how, using two separate Vertical-Cavity-Surface-Emitting-Lasers (VCSELs), a miniature laser-Doppler interferometer can be made for quasi-three-dimensional displacement measurements. For the use in consumer applications as PC-mice, the manufacturing costs of such sensors need to be minimized. This paper describes the fabrication of a low-cost laser-self-mixing sensor by integrating silicon and GaAs components using flipchip technology. Wafer-scale lens replication on GaAs wafers is used to achieve integrated optics. In this way a sensor was realized without an external lens and that uses only a single GaAs VCSEL crystal, while maintaining its quasi-threedimensional sensor capabilities.