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Robust and Hermetic Borosilicate Glass Coatings by E-Beam Evaporation

 
: Hansen, U.; Maus, S.; Leib, J.; Töpper, M.

:
Postprint (PDF; )

Procedia chemistry. Online journal 1 (2009), No.1, pp.76-79
http://www.sciencedirect.com/science/journal/18766196
ISSN: 1876-6196
Eurosensors <23, 2009, Lausanne>
English
Conference Paper, Journal Article, Electronic Publication
Fraunhofer IZM ()

Abstract
The use of a plasma-assisted e-beam evaporation process enables a cost-efficient exploitation of the outstanding material properties of borosilicate glass - a chemically very inert material with minimal moisture absorption, excellent optical properties and excellent time and temperature stability. This paper gives further insight on the deposition and structuring of borosilicate glass films and the achievable film properties as well as feasible applications.

: http://publica.fraunhofer.de/documents/N-172995.html