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Gravitationsgestützte galvanische Abscheidung zur Erzeugung dreidimensional kristallin strukturierter Oberflächen

Gravitation-enhanced electrodeposition to form three-dimensional crystalline structured surfaces
 
: Schmidt, R.; Zwanzig, M.; Moritz, H.

Galvanotechnik 101 (2010), No.5, pp.1010-1015
ISSN: 0016-4232
German
Journal Article
Fraunhofer IZM ()

Abstract
Using the process known as gravitation-enhanced electrodeposition, structured metal layers can be formed without the use of masks in a specially designed cell. In this process, the depletion of metal ions at the deposition interface is avoided, by use of a rocking cell. Using this technology, encouraging results were obtained for Flip-Chip bonding, bringing advantages in the production of stacked, thinned chips in a wafer assembly.

: http://publica.fraunhofer.de/documents/N-172964.html