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Novel test structures for hermeticity testing of wafer bonding technologies

 
: Schneider, A.; Rank, H.; Müller-Fiedler, R.; Wittler, O.; Reichl, H.

Electrochemical Society -ECS-:
218th ECS meeting abstracts 2010. Vol.3 : Las Vegas, Nevada, USA, 10 - 15 October 2010
Red Hook, NY: Curran, 2011
ISBN: 978-1-617-82094-6
pp.1696
Electrochemical Society (Meeting) <218, 2010, Las Vegas/Nev.>
English
Abstract
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-172913.html