Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Development of a novel DC plasma source for coating and surface modification under atmospheric pressure

 
: Theophile, E.; Kim, H.-M.; Dzulko, M.; Landes, K.D.; Rogler, D.; Maeder, G.; Hopfe, V.

Dahotre, N.B.; Popoola, O.O.:
Surface Engineering - Proceedings of the 3rd International Surface Engineering Conference : August 2-4, 2004, Orlando
Materials Park, Ohio: ASM International, 2004
ISBN: 0-87170-819-1
pp.179-183
International Surface Engineering Congress <3, 2004, Orlando>
English
Conference Paper
Fraunhofer IWS ()

Abstract
A new type of DC plasma source was developed for an improved treatment of extended planar surfaces with plasma based processes under atmospheric pressure. In this paper, the Long Arc Generator ("LARGE") is presented with the focus on its physical principle and on its operation parameters. According to the geometry of the plasma source the emanating plasma jet is up to 450mm broad in the present state of development. It allows a more homogeneous and economical treatment of large planar substrates than it was possible with conventional plasma sources. An example of application of the LARGE plasma generator is demonstrated with a CVD coating process under atmospheric pressure.

: http://publica.fraunhofer.de/documents/N-172770.html