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Strain determination using electron backscatter diffraction

: Krause, M.; Graff, A.; Altmann, F.


Zschech, E. ; American Institute of Physics -AIP-, New York:
Stress-induced phenomena in metallization. Eleventh International Workshop on Stress-Induced Phenomena in Metallization 2010 : Bad Schandau, Germany, 12 - 14 April 2010
Woodbury, N.Y.: AIP, 2010 (AIP Conference Proceedings 1300)
ISBN: 978-0-7354-0855-5
ISSN: 0094-243X
International Workshop on Stress-Induced Phenomena in Metallization <11, 2010, Bad Schandau>
Conference Paper
Fraunhofer IWM ()

In the present paper we demonstrate the use of electron backscatter diffraction (EBSD) for high resolution elastic strain determination. Here, we focus on analysis methods based on determination of small shifts in EBSD pattern with respect to a reference pattern using cross-correlation algorithms. Additionally we highlight the excellent spatial and depth resolution of EBSD and introduce the use of simulated diffraction patterns based on dynamical diffraction theory for sensitivity estimation. Moreover the potential of EBSD for strain analysis of strained thin films with particular emphasis on appropriate target preparation which respect to occurring lattice defects is demonstrated.