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Synchronous discrete event simulation for fast and efficient simulation of a complete semiconductor factory

: Vogt, H.


Graef, M. ; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.; Institute of Electrical and Electronics Engineers -IEEE-:
ASMC 2003, the 14th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. Proceedings : Advancing the science of semiconductor manufacturing excellence
Piscataway, NJ: IEEE, 2003
ISBN: 0-7803-7673-0
Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) <14, 2003, München>
Conference Paper
Fraunhofer IMS ()
diskrete Simulierung; semiconductor factory simulation; discrete event simulation; compact C++ modeling; Halbleiterfertigung; Simulation

A new discrete event simulation setup and simulator called FabSim is presented. It is a single C++ executable ready for simulating a semiconductor factory of any size. It is based on System C and applies synchronous discrete event simulation. Several data files serve as input: a list describing the equipment (including data like batch size, process steps offered, throughput and others), flow charts of all processes (unlimited number of product, rework and test flows) and a list of lots to be started. Outputs are data files describing machine use, buffer occupancy, cycle time of lots processed etc.. Simulation speed is very high. A fab with 500 wafer starts per day will require a simulation time of 6 minutes on a PC for 1 year of operation. The simulation tool presented here is compact and fast, easy to setup and use.