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Ion projection printing for patterning of magnetic media

: Dietzel, A.; Berger, R.; Grimm, H.; Bruenger, W.H.; Dzionk, C.; Letzkus, F.; Springer, R.; Loeschner, H.; Platzgummer, E.; Terris, B.D.

INTERMAG Europe 2002. Digests of technical papers : IEEE International Magnetics Conference, April 28 - May 2, 2002, Amsterdam
Piscataway, NJ: IEEE Service Center, 2002
ISBN: 0-7803-7365-0
ISSN: 0074-6843
International Magnetics Conference <2002, Amsterdam>
Conference Paper
Fraunhofer ISIT ()

Feasibility of ion projection printing for full disk surface processing was investigated. The influence of different ion species and ion energies on the Co/Pt interfaces was evaluated by Monte Carlo simulations. In a single exposure step several tracks within an exposure field of 17.5 mm in diameter were magnetically structured by projecting 45 keV He+ at a 4-fold demagnification.