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Ion projection printing for patterning of magnetic media

 
: Dietzel, A.; Berger, R.; Grimm, H.; Bruenger, W.H.; Dzionk, C.; Letzkus, F.; Springer, R.; Loeschner, H.; Platzgummer, E.; Terris, B.D.

INTERMAG Europe 2002. Digests of technical papers : IEEE International Magnetics Conference, April 28 - May 2, 2002, Amsterdam
Piscataway, NJ: IEEE Service Center, 2002
ISBN: 0-7803-7365-0
ISSN: 0074-6843
International Magnetics Conference <2002, Amsterdam>
English
Conference Paper
Fraunhofer ISIT ()

Abstract
Feasibility of ion projection printing for full disk surface processing was investigated. The influence of different ion species and ion energies on the Co/Pt interfaces was evaluated by Monte Carlo simulations. In a single exposure step several tracks within an exposure field of 17.5 mm in diameter were magnetically structured by projecting 45 keV He+ at a 4-fold demagnification.

: http://publica.fraunhofer.de/documents/N-172317.html