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Ion projection direct-structuring for nanotechnology applications

: Loeschner, H.; Fantner, E.J.; Korntner, R.; Platzgummer, E.; Stengl, G.; Zeininger, M.; Baglin, J.E.E.; Berger, R.; Brünger, W.H.; Dietzel, A.; Baraton, M.-I.; Merhari, L.

Orlando, T.M. ; Materials Research Society -MRS-:
Three-dimensional nanoengineered assemblies : Symposium held December 1 - 5, 2002, Boston, Massachusetts, U.S.A.; Symposium H "Three-Dimensional Nanoengineered Assemblies", held December 1 - 5 at the 2002 MRS fall meeting in Boston, Massachusetts
Warrendale, Pa.: MRS, 2003 (Materials Research Society Symposium Proceedings 739)
ISBN: 1-558-99676-1
ISSN: 0272-9172
Symposium H "Three-Dimensional Nanoengineered Assemblies" <2002, Boston/Mass.>
Materials Research Society (Fall Meeting) <2002, Boston/Mass.>
Conference Paper
Fraunhofer ISIT ()

Large-field ion-optics has been developed for reduction printing. Sub-100nm ion projection direct-structuring (IPDS) of patterned magnetic media discs has been demonstrated, extending over 17mm diameter exposure fields, in a single exposure. First results of IPDS patterning of nanocomposite resist material are presented. Information about a novel 200x reduction projection focused ion multi-beam (PROFIB) tool development is provided. Further IPDS nanotechnology applications are discussed.