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Characterization of microelectromechanical (MEMS) HF-switches

 
: Shakhrai, M.V.; Huth, C.; Quenzer, J.; Lisec, T.

:

Melker, A.I.:
Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering : 9 - 15 June 2003, St. Petersburg
Bellingham, WA: SPIE, 2004 (Proceedings of SPIE 5400)
ISBN: 0-8194-5323-4
pp.34-37
International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering <7, 2003, St. Petersburg>
English
Conference Paper
Fraunhofer ISIT ()

Abstract
Microelectromechanical capacitive radiofrequency switches are considered. Design and technological process are reported. Switching charactersitics and thermal behaviour are investigated. Ways to improve the measured parameters are shown. The switches are prospective for wireless telecommunication systems, in particular for mobile communications.

: http://publica.fraunhofer.de/documents/N-172308.html