Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Dielectric charging process in A1N RF-MEMS capacitive switches

: Papaioannou, G.J.; Lisec, T.


European Microwave Association:
2nd European Microwave Integrated Circuits Conference, EuMIC 2007 : 8 - 10 Oct. 2007, Munich, Germany; Part of European Microwave Week 2007, EuMW 2007
Piscataway: IEEE, 2007
ISBN: 2-87487-002-1
ISBN: 978-2-87487-002-6
European Microwave Integrated Circuit Conference (EuMIC) <2, 2007, Munich>
Conference Paper
Fraunhofer ISIT ()

The paper investigates the electrical properties of magnetron sputtered AIN in view of application in RF-MEMS capacitive switches. The assessment is performed with the aid of application of thermally stimulate polarization currents in MIM capacitors and temperature dependence of device capacitance. The study reveals the presence of a surface charge, which is smaller than the expected from material spontaneous polarization, but definitely is responsible for the low degradation rate under certain bias polarization life tests.