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Failure mechanisms of AIN based RF-MEMS switches under DC and ESD stresses

 
: Ruan, J.; Nolhier, N.; Bafleur, M.; Bary, L.; Mauran, N.; Coccetti, F.; Lisec, T.; Plana, R.

:

Mahapatra, S.; Radhakrishnan, M. K.:
14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007 : 11 - 13 July 2007, Bangalore
Piscataway: IEEE, 2007
ISBN: 1-424-41014-2
ISBN: 978-1-424-41014-9
pp.120-123
International Symposium on the Physical and Failure Analysis of Integrated Circuits <14, 2007, Bangalore>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/N-172291.html