Abstract
In the present article we characterize several intermetallic phases of the Cu-Ni-Fe-Si system found as precipitates in the misfit dislocation layer of intentionally contaminated and slowly cooled Si1-x Gex Si -heterostructures. The clusters showed a characteristic phase speciation into a Cu-rich part similar to Cu3 Si and an Fe-Ni-Cu-Si phase similar to NiSi2. It is suggested that the precipitate formation of the investigated intermetallic silicides involves a homogeneous precursor phase at higher temperatures that later decomposes into the observed phases. Our results indicate that chemical reactions between metals and silicon during precipitation may reduce the lattice mismatch compared to single-metal precipitates, rendering mixed-metal-silicide precipitates more stable and energetically favorable.