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Gripping tool for MEMS assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency

: Pfeifer, T.; Aleriano, U.; Depiereux, F.


Behringer, U.F.W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MEMS/MOEMS: Advanced in photonic communications, sensing, metrology, packaging and assembly : 28 - 29 October 2002, Brugge, Belgium
Bellingham, Wash.: SPIE, 2003 (SPIE proceedings series 4945)
ISBN: 0-8194-4740-4
Conference MEMS/MOEMS <2002, Brugge>
Conference Paper
Fraunhofer IPT ()

Reduction in the size of produced parts, increases the difficulty for precise manufacturing observation-processes and it makes manufacturing control cycles even more complex. Among all the production steps for micro-systems, assembly seems to be specially affected with this manufacturing handicap. Usual sensors used for the macro-world have to be modified or redesigned in order to address its use for the micro-world. This document presents the integration of a white light interferometer into a flexible fibre-scope used already for process monitoring purposes and which is mounted into a gripping-tool. The goal is to achieve a linear measurement between a gripping-tool and a target-part during the assembly process of hybrid micro systems.