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Wafer level glass optics. Precision glass molding as an alternative manufacturing approach

: Hünten, M.; Hollstegge, D.; Wang, F.; Dambon, O.; Klocke, F.


Schoenfeld, W.V. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV : 22.-27.1.2011, San Francisco, California, USA
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7927)
ISBN: 978-0-8194-8464-2
Paper 79270L
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" <4, 2011, San Francisco/Calif.>
Conference Paper
Fraunhofer IPT ()

In this paper the manufacturing approach of wafer scale molded glass optics is described including a detailed view on each process step that needs to be accomplished. At first, an appropriate mold design based on FE-simulation results is applied. As in every replication process the mold is the key factor of success which is precision ground to its required shape. At this point different grinding kinematics with their characteristics are presented. In the final molding process one of the major challenges is the alignment of the upper and lower mold die to guarantee the centricity of the optical surfaces.